JPH0373432U - - Google Patents
Info
- Publication number
- JPH0373432U JPH0373432U JP13383689U JP13383689U JPH0373432U JP H0373432 U JPH0373432 U JP H0373432U JP 13383689 U JP13383689 U JP 13383689U JP 13383689 U JP13383689 U JP 13383689U JP H0373432 U JPH0373432 U JP H0373432U
- Authority
- JP
- Japan
- Prior art keywords
- cooling plate
- electrode
- support
- tube bolt
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13383689U JPH0373432U (en]) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13383689U JPH0373432U (en]) | 1989-11-17 | 1989-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0373432U true JPH0373432U (en]) | 1991-07-24 |
Family
ID=31681225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13383689U Pending JPH0373432U (en]) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0373432U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019135749A (ja) * | 2018-02-05 | 2019-08-15 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
-
1989
- 1989-11-17 JP JP13383689U patent/JPH0373432U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019135749A (ja) * | 2018-02-05 | 2019-08-15 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |